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SIDE MENU
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UPDATE: IMPORTANT DATES
Abstract Submission Opens
November 5, 2009
Abstract Submission Deadline
January 15, 2010
Late-News Submission Deadline
March 7, 2010
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Program
The current preliminary program is listed below. Please note that changes may occur to this program before it is finalized.
Tutoral Chair: Stefan Zollner
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8:45 - 9:45 AM
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Tutorial 1
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| Physics of the Optical Functions
Josef Humlicek. Masaryk University, Brno, Czech Republic
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10:00 - 11:00 AM
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Tutorial 2
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| Relationship of Dielectric Function to Band Structure
M. I. Alonso, M. Garriga. Institut de Ciència de Materials de Barcelona - CSIC, 08193 Bellaterra, Spain
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11:15 - 12:15 PM
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Tutorial 3
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| Plasmons and effective medium theories
David Aspnes. North Carolina State University
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1:45 - 2:45 PM
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Tutorial 4
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| Mueller and Jones Matrix Analysis of Complex Optical Systems
Robert W. Collins, Jian Li. University of Toledo, Department of Physics and Astronomy, Toledo, OH, United States
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3:00 - 4:00 PM
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Tutorial 5
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| Principles of ellipsometry data analysis
Gerald E Jellison. Oak Ridge National Laboratory, Oak Ridge, TN, United States
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4:15 - 5:15 PM
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Tutorial 6
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| Generalized Ellipsometry of anisotropic materials
Mathias Schubert. University of Nebraska
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7:00 - 9:00 PM
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Conference Welcome
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Chair: G.E. Jellison
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| Overview of the College of Nanoscale Science and Engineering (CNSE) & Overview of Ellipsometry at CNSE's Albany NanoTech Complex
Alain C. Diebold. College of Nanoscale Science and Engineering, Albany, NY, United States
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9:15 - 10:00 AM
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Plenary 2
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Chair: Rob Collins
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| Applications of ellipsometry in nanoscale science: Needs, status, achievements and future challenges
Maria Losurdo. University of Bari, Italy
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10:30 - 12:15 PM
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Real Time Spectroscopic Ellipsometry
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Chair: Josette Rivory
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10:30
| Use of real-time spectroscopic ellipsometry to develop a chemical-etch-assisted growth process for ZnO by MOCVD
Eric J Adles. University of Maryland Baltimore County, Baltimore, MD, United States
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11:00
| Spectroscopic ellipsometry study for achieving superfine-structure one monolayer-thick InN/GaN-matrix QWs by MBE
Akihiko Yoshikawa, Naoki Hashimoto, Yoshihiro Ishitani, Kazuhide Kusakabe. Chiba University, Chiba, Japan
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11:30
| Real time in-situ observation of the formation of GaSb nanopillars by spectroscopic ellipsometry
Ingar S. Nerbø1, Morten Kildemo1, Sebastien Le Roy2, Elin Søndergård2. 1Norwegian University of Science and Technology, Trondheim, Norway, 2CNRS/Saint-Gobain, Aubervilliers, France
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12:00
| Real-Time Spectroscopic Ellipsometry of CdTe Thin Films: Effects of Deposition Parameters on Initial Structural Evolution and Photovoltaic Device Performance
Michelle N. Sestak, Jian Li, Robert W. Collins. Center for Photovoltaics Innovation and Commercialization, University of Toledo, Toledo, OH, United States
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1:45 - 3:45 PM
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Confined Electron Systems, Plasmons, and Metamaterials
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Chair: Josef Humlicek
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1:45
| Dynamical Response and Confinement of the Electrons at the LaAlO3/SrTiO3 interface
Adam Dubroka1, Matthias Rössle1, Kyungwan W. Kim1, Vivek K. Malik1, Leander Schulz1, Stefan Thiel2, Christof W. Schneider2, Jochen Mannhart2, Gervasi Herranz3, Olivier Copie3, Manuel Bibes3, Agnes Barthélémy3, Christian Bernhard1. 1Department of Physics University of Fribourg, Chemin du Musee 3, Fribourg, Switzerland, 2Center for Electronic Correlations and Magnetism Institute of Physics University of Augsburg, Augsburg, Germany, 3Unité Mixte de Physique CNRS/Thales associée à l'Université Paris-Sud, Campus de Polytechnique 1 Avenue A. Fresnel, Palaiseau, France
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2:15
| Ab initio Simulation of a 2D Split Ring based Metamaterial
Ulrich Dobramysl1,2, Kurt Hingerl1. 1Christian Doppler Laboratory for Surface Optics, Center for Surface- and Nanoanalytics, Johannes Kepler University, 4040 Linz, Austria, 2Department of Physics, Virginia Tech,, Blacksburg, VA, United States
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2:45
| Mueller-matrix ellipsometry of anisotropic plasmon resonances in silver nanowire arrays
Tom W.H. Oates1,3, Mukesh Ranjan2, Johanna Rosen1, Stefan Facsko2, Hans Arwin1. 1IFM, Linkoping University, Linkoping, Sweden, 2Forschungszentrum Dresden-Rossendorf, Dresden, Germany, 3University of Sydney, Sydney, Australia
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3:00
| Tailoring geometry, optical properties and functionalization of gold nanoparticles
Maria Michela Giangregorio, Giuseppe Valerio Bianco, Pio Capezzuto, Maria Losurdo, Giovanni Bruno. CNR-IMIP University of Bari, Bari, Italy
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3:15
| Nanostructured chiral silver thin films: a route to metamaterials at optical frequencies
Bruno Gallas1, Josette Rivory1, Hans Arwin2, Roger Magnusson2, Geraldine Guida3, Jian Yang4, Kevin Robbie4. 1INSP, CNRS, Université Pierre et Marie Curie, Paris, France, 2Laboratory of Applied Optics, IFM, Linköping, Sweden, 3LEME (EA4416-OMS), Université Paris Ouest, Ville d'Avray, France, 4Department of Physics - Queen's University, Kingston, ON, Canada
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3:30
| Infrared Resonances of Local Fields and Ellipsometric Spectra of Negative-refraction Metamaterials
Josef Humlicek. Masaryk University, Brno, Czech Republic
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4:15 - 6:00 PM
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Complex Materials and Surfaces
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Chair: TBD
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4:15
| Diffuse Scattering Ellipsometry
Thomas A. Germer. National Institute of Standards and Technology, Gaithersburg, MD, United States
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4:45
| Analysis of the temperature dependence of particle plasmon polariton and interband transitions in silver nanoparticles by in situ and real time spectroscopic ellipsometry
Sylvain Marsillac, Scott Little, Robert Collins. University of Toledo, Toledo, OH, United States
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5:15
| In-situ recording of ion beam induced periodic pattern formation on Ag(001)
Herbert Wormeester, Frank Everts, Bene Poelsema. Solid State Physics, Mesa+ Institute for Nanotechnology, Enschede, Netherlands
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5:30
| Dielectric Properties of Ultrathin Metal Films around the Percolation Threshold
Bruno Gompf, Martin Hövel, Martin Dressel. Universität Stuttgart, 1.Pyhsikalisches Institut, Stuttgart, Germany
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5:45
| Ellipsometric Characterization of Aluminum- Nitride: Nickel composite thin films
SANDRA E RODIL, DAGOBERTO CARDONA, ZEUZ MONTIEL, STEPHEN MUHL. INSTITUTO DE INVESTIGACIONES EN MATERIALES, UNIVERSIDAD NACIONAL AUTONOMA DE MEXICO, MEXICO DF, Mexico
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Chair: G. E. Jellison
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| The intertwined history of polarimetry and ellipsometry
Rasheed Azzam. University of New Orleans, USA
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9:00 - 10:00 AM
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Complementary Techniques and Correlations I
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Chair: Tetsuji Yasuda
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9:00
| Linear and Nonlinear Optical Studies of Oriented Polymer Thin Films
Lee J Richter. National Institute of Standards and Technology, Gaithersburg, MD, United States
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9:30
| Nonlinear Optical Stokes Ellipsometry for Material Characterization
Garth Simpson. Purdue University, Department of Chemistry
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10:30 - 12:15 PM
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Properties of Thin Films, Complex Materials, and Material Systems
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Chair: Hiroyuki Fujiwara
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10:30
| Optical Properties and Morphology of Cluster-Assembled Nanoporous Gold Films
Francesco Bisio1, Mirko Prato2, Ornella Cavalleri3, Lorenzo Mattera3, Maurizio Canepa3. 1CNR-INFM LAMIA, Genova, Italy, 2INFN, Genova, Italy, 3CNISM, Genova, Italy
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10:45
| Scatterometric Porosimetry: a new method to characterize porous ultra low-k patterned layers
Christophe LICITRA1, Regis BOUYSSOU2, Thierry CHEVOLLEAU2, Mohamed EL KODADI2, Maxime BESACIER2, Francois BERTIN1, Patrick SCHIAVONE2. 1CEA, LETI, MINATEC, Grenoble, France, 2CNRS-LTM, Grenoble, France
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11:00
| Controlled Swelling of Stimuli-Responsive Polymer Brushes and Protein Adsorption Thereon
Eva Bittrich1, Keith Brian Rodenhausen2, Klaus-Jochen Eichhorn1, Tino Hofmann2, Petra Uhlmann1, Mathias Schubert2, Manfred Stamm1. 1Leibniz Institute of Polymer Research Dresden, Dresden, Germany, 2Department of Electrical Engineering, University Nebraska - Lincoln, Lincoln, NE, United States
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11:15
| Depth Profiling In Organic Semiconductors
Mariano Campoy-Quiles1,2, Malte Schmidt1, Toby A. Ferenczi2, Imma Suarez3, Manuela Russo2, Paul Lacharmoise1, Juan Cabanillas-Gonzalez3,4, Natalie Stingelin-Stutzmann2, Jenny Nelson2, Donal D. C. Bradley2, Pablo G. Etchegoin5. 1Material Science Institute of Barcelona (ICMAB-CSIC), Barcelona, Spain, 2Imperial College London, London, United Kingdom, 3Politecnico di Milano, Milano, Italy, 4Madrid Institute for Advanced Studies in Nanoscience (IMDEA), Madrid, Spain, 5University of Victoria, Wellingon, New Zealand
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11:30
| Ellipsometric Study of Amorphous Carbon Thin-films as Infrared Dielectric Materials
Andreas Hertwig1, Maksym Rybachuk1,2, Matthias Weise1, Uwe Beck1. 1BAM - Fed. Inst. for Materials Research and Testing, Berlin, Germany, 2QUT - Queensland University of Technology, Brisbane, Australia
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11:45
| Annealing effects on the optical properties of semiconducting boron carbide in the NIR-VIS-VUV spectral range
Ravi B Billa1, Tino Hofmann2, Mathias Schubert2, Brian W Robertson1. 1Department of Mechanical Engineering and Nebraska Center for Materials and Nanoscience, Lincoln, NE, United States, 2Department of Electrical Engineering and Nebraska Center for Materials and Nanoscience, Lincoln, NE, United States
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12:00
| Spectroscopic Ellipsometry Studies of Nickel Manganite Spinel Thin Films for Microbolometer Applications
Nikolas J. Podraza1, David Saint John2, Song Won Ko2, Heidi M. Schulze2, Jing Li2, Elizabeth C. Dickey2, Susan Trolier-McKinstry2. 1Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, United States, 2Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA, United States
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1:45 - 3:45 PM
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Supplier Session
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Chair: Thomas A. Germer
1:45
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Progress in Spectroscopic Ellipsometry
James N. Hilfiker (J.A. Woollam Co.)
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2:00
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HORIBA Scientific: 20 years of Innovation in Ellipsometry
Denis Cattelan (HORIBA Scientific)
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2:15
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From Brewster Angle Microscopy to Imaging Spectroscopic Ellipsometry – new developments in imaging technology, data acquisition and optical modeling in Nanofilm surface analysis
Peter H. Thiesen (Accurion GmbH)
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| 2:30
| Richard Sun (Angstrom Sun Technologies Inc.
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2:45
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Transmission Ellipsometers Using PEM Technology
Baoliang (Bob) Wang (Hinds Instruments)
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3:00
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SENTECH’s new spectroscopic ellipsometers for the analysis of magnetic and organic materials and films in the UV-VIS-NIR-MIR spectral range
Bernd Gruska (SENTECH Instruments GmbH)
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3:15
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Jean-Louis Stehle (SOPRALAB)
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4:15 - 6:00 PM
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Applications
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Chair: Miklos Fried
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4:15
| Spectroscopic ellipsometry characterization of silicon thin-film solar cells
Hiroyuki Fujiwara, Masataka Akagawa, Shouta Kageyama, Yousuke Kanie, Kouji Watanabe, Nobuyuki Matsuki. Gifu University, Gifu, Japan
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4:45
| Determination of the Dill parameters of thick positive resist for use in modeling applications
Georg Roeder1, Shijie Liu1, Peter Evanschitzky1, Andreas Erdmann1,2, Gülnur Aygün1, Martin Schellenberger1, Lothar Pfitzner1, Lothar Frey1,2. 1Fraunhofer Institute for Integrated Systems and Device Technology (IISB), Erlangen, Germany, 2Erlangen Graduate School in Advanced Optical Technologies (SAOT), Erlangen, Germany
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5:00
| Ellipsometry characterization of a-Si:H layers for thin-film solar cells
Shota Kageyama, Masataka Akagawa, Hiroyuki Fujiwara. Gifu University, Gifu, Japan
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5:15
| Polarimetric Imaging of Strain in Multi Crystalline Silicon
Lars Martin Aas, Morten Kildemo. Norwegian University of Science and Technology, Trondheim, Norway
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5:30
| Real Time Spectroscopic Ellipsometry for controlling the drying process of organic blend films
Christine Walsh1, Benjamin Schmidt-Hansberg2, Xavier Schimowski1, Jean Philippe Piel1. 1SOPRALAB, Courbevoie, France, 2Karlsruhe Institute of Technology, Karlsruhe, Germany
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5:45
| Investigation of optical properties of BCB wafer bonding layer used for 3D-Interconnects via infrared spectroscopic ellipsometry
Vimal K Kamineni1, Pratibha Singh2,3, Lay-wai Kong1, John Hudnall3, Jamal Qureshi3, Chris Taylor3, Andy Rudack3, Sitaram Arkalgud3, Alain C Diebold1. 1College of Nanoscale Science & Engineering, University at Albany, Albany, NY, United States, 2GLOBALFOUNDRIES Inc., Albany, NY, United States, 3SEMATECH, Albany, NY, United States
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7:00 - 9:00 PM
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Poster Session 1
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Chair: G.E. Jellison
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| Polarization modulation ellipsometry and polarimetry
Bernard Drevillon. Ecole Polytechnique Palaiseau, France
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9:15 - 10:00 AM
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Plenary 5
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Chair: Rob Collins
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| Ellipsometry and related complementary analysis of photovoltaic materials and devices
Dean Levi. National Renewable Energy Laboratory, USA
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10:30 - 12:15 PM
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Infrared and Mueller Matrix Ellipsometry
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Chair: Harland Tompkins
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10:30
| In situ IR ellipsometry of solid-liquid interfaces
Karsten Hinrichs1, Jörg Rappich2. 1Leibniz – Institut für Analytische Wissenschaften - ISAS - e.V., Berlin, Germany, 2Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, Institut für Si Photovoltaik, Berlin, Germany
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11:00
| Characterization of 2D Photonic Structures Using Infrared Polarimetry
Angel Lizana1, Josep Borrull2, Enric Garcia-Caurel3, Josep Pallarès2, Lluis F Marsal2. 1Universitat Autònoma de Barcelona, Dept. Física, Bellaterra, Spain, 2Departament d'Enginyeria Electrònica, Elèctrica i Automàtica, Universitat Rovira i Virgili, Tarragona, Spain, 3LPICM, Ecole Polytechnique, CNRS, Palaiseau, France
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11:15
| Transmission Mueller Matrix Ellipsometry of Chirality Switching Phenomena
Oriol Arteaga1, Adolf Canillas1, Josep M. Ribó2. 1Dep. Física Aplicada i Òptica, IN2UB, Barcelona, Spain, 2Dep. Química Orgànica, Barcelona, Spain
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11:45
| Left and Right Polarizing Natural Structures – Full Mueller-matrix Ellipsometry Studies of Chiral Structures in Scarab Beetles
Kenneth Jarrendahl, Jan Landin, Hans Arwin. Dept. of Physics, Chemistry and Biology, Linkoping, Sweden
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12:00
| Mueller Matrices for anisotropic multiferroics and metamaterials generated using 4×4 matrix formalism
P. D. Rogers1, T. D. Kang1, T. Zhou1, M. Kotelyanskii1,2, A. A. Sirenko1. 1New Jersey Institute of Technology, Newark, NJ, United States, 2Rudolph Technologies Inc., Flanders, NJ, United States
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1:45 - 3:45 PM
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Instrumentation and Parameterization
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Chair: Uwe Beck
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1:45
| Polarimetric diagnosis of 193-nm lithography equipments, using a mask with newly-developed polarization optical elements
Hiroshi Nomura. Toshiba Corp., Yokohama, Japan
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2:15
| Nano-structure measurement by Mueller matrix spectro-polarimeter
Yukitoshi Otani, Satoshi Takano, Yasuhiro Mizutani. Tokyo University of Agriculture and Technology, Tokyo, Japan
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2:30
| Using Ellipsometry for the Validation of LCVRs for the Polarisation Modulators onboard the Solar Orbiter Space Mission
Alberto Alvarez-Herrero1, Néstor Uribe-Patarroyo1, Pilar García Parejo1, Javier Vargas1, Raquel L. Heredero1, Marc Georges2, Silvano Fineschi3, Gerardo Capobianco3, Valentín Martínez-Pillet4, Jose Carlos del Toro Iniesta5, Antonio López5, Manuel López6, Gerben Boer7, Ilias Manolis8. 11Instituto Nacional de Técnica Aeroespacial-INTA, Madrid, Spain, 2Center Spatial de Liége-CSL, Liege, Belgium, 33Istituto Nazionale di Astronomia-INAF, Observatorio AStronomico di Torino, Torino, Italy, 44Instituto de Astrofísica de Canarias-IAC, La Laguna, Spain, 5Instituto de Astrofísica de Canarias-IAA CSIC, Granada, Spain, 6Visual Display S. L., Valladolid, Spain, 7Arcoptix S. A., Neuchatel, Switzerland, 88European Space Agency-ESA, Noordwijk, Netherlands
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2:45
| Combination of Synchrotron Ellipsometry and Table-top Optical Measurements for Determination of Band Structure of DLC Films
Daniel Franta1, David Nečas1, Lenka Zajíčková1, Vilma Buršíková1, Christoph Cobet2. 1Department of Physical Electronics, Faculty of Science, Masaryk University, Brno, Czech Republic, 2Institute for Analytical Sciences, Berlin, Germany
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3:00
| Application of a sum decomposition to finite spot size Mueller matrix measurements
Martin Foldyna1, Enric Garcia-Caurel2, Razvigor Ossikovski2. 1 Optical Technology Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899-8443, MD, United States, 2LPICM, Ecole Polytechnique, 91128 Palaiseau, France
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3:15
| Characterization of Nanocrystals in Silicon Rich Oxide Superlattices and Porous Silicon
Emil Agócs1,2, Péter Petrik1, Silvia Milita3, Lia Vanzetti4, Spiros Gardelis5, Georg Pucker4, Roberto Balboni3, Tivadar Lohner1, Miklós Fried1, Androula G. Nassiopoulou5. 1Research Institute for Technical Physics and Materials Science, Budapest, Hungary, 2University of Pannonia, Veszprém, Hungary, 3CNR-IMM Sezione Bologna, Bologna, Italy, 4Fondazione Bruno Kessler, Trento, Italy, 5IMEL/NCSR Demokritos, Athens, Greece
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3:30
| Spectroscopic ellipsometry on graphene
J.W. Weber, M.C.M. van de Sanden. University of Technology Eindhoven, Eindhoven, Netherlands
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6:00 - 9:00 PM
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Conference Banquet
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8:30 - 10:00 AM
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Plenary 6
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Chair: M. Shubert
8:30
| Application of Ellipsometry Techniques to Biological Materials
Hans Arwin. Laboratory of Applied Optics, IFM, Linköping University, Linköping, Sweden
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9:15
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TBD
Manuel Cardona |
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10:30 - 12:15 PM
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Optical Properties of Semiconductors, Dielectrics and their Interfaces
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Chair: Maria Losurdo
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10:30
| Optical properties of high-quality cubic InN, GaN, AlN, and related alloys grown on 3C-SiC
Marcus Röppischer1, Christoph Cobet1, Norbert Esser1, Georg Rossbach2, Pascal Schley2, Rüdiger Goldhahn2, Martin Feneberg3, Benjamin Neuschl3, Klaus Thonke3, Thorsten Schupp4, Klaus Lischka4, Donat As4. 1Leibniz-Institut für Analytische Wissenschaften-ISAS, Albert-Einstein-Str.9, 12489 Berlin, Germany, 2Institut für Physik, Technische Universität Ilmenau, PF 100565, 98684 Ilmenau, Germany, 3Institut für Halbleiterphysik, Universität Ulm, 89069 Ulm, Germany, 4Department Physik, Universität Paderborn, Warburger Strasse 100, 33098 Paderborn, Germany
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10:45
| Dielectric properties and thickness metrology of strain engineered GaN/AlN/Si(111) thin films grown by MOCVD
Mihir Tungare, Vimal K Kamineni, Fatemeh Shahedipour-Sandvik , Alain C Diebold. College of Nanoscale Science and Engineering, University at Albany, Albany, NY, United States
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11:00
| High resolution UV-VUV-Ellipsometry: ZnO interband transitions and exciton-polaritons
Munise Cobet1, Christoph Cobet2, Norbert Esser2, Axel Hoffmann1. 1Institute for Solid State Physics, Technische Universitaet Berlin, Berlin, Germany, 2Leibniz Institut fuer Analytische Wissenschaften - ISAS - e.V., Berlin, Germany
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11:30
| Dielectric function and crystal structure of BaTiO3 and BaTiO3 / ZnO heterostructures
Tammo Böntgen, Stefan Schöche, Rüdiger Schmidt-Grund, Chris Sturm, Mathias Brandt, Holger Hochmuth, Michael Lorenz, Marius Grundmann. Universtät Leipzig, Institut für Experimentelle Physik II, Leipzig, Germany
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11:45
| Vacuum-Ultraviolet Reflectance Difference Spectroscopy for Characterizing Dielectrics-Semiconductor Interfaces
Shoichi Ogata1, Shinya Ohno1, Masatoshi Tanaka1, Takahiro Mori2, Tsuyoshi Horikawa2, Tetsuji Yasuda2. 1Yokohama National University, Yokohama, Japan, 2National Instititute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan
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12:00
| Observation of bond-by-bond interface formation during the oxidation of (111) Si
Kenan Gundogdu1, Bilal Gokce1, David E. Aspnes1, Eric J. Adles1,2. 1North Carolina State University, Raleigh, NC, United States, 2University of Maryland, Baltimore, MD, United States
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1:45 - 3:45 PM
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Anisotropic Materials and Generalized Ellipsometry
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Chair: Bernard Drevillon
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1:45
| Development and applications of Mueller polarimetry
Antonello De Martino. LPICM - CNRS, Palaiseau, France
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2:15
| Ellipsometric selective sensitivity to magnetic nanostructures
Kamil Postava1, David Hrabovsky1, Ondrej Zivotsky1, Jana Hamrlova1, Jaromir Pistora1, Andrzej Wawro2, L. T. Baczewski2, A. Maziewski3. 1Department of Physics, Technical University of Ostrava, Ostrava, Czech Republic, 2Institute of Physics, Polish Academy of Sciences, Warsaw, Poland, 3Laboratory of Magnetism, University of Bialystok, Bialystok, Poland
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2:45
| Anisotropic Optical and Magneto-Optical Properties of Sculptured Thin Films
Daniel Schmidt, Tino Hofmann, Eva Schubert, Mathias Schubert. University of Nebraska-Lincoln, Lincoln, NE, United States
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3:00
| Free-charge carrier properties and doping mechanisms of thin films of InN and related alloys
Vanya Darakchieva1,2, Mathias Schubert3, Katharina Lorenz1, Nuno P Barradas1, Eduardo Alves1, Tino Hofmann3, Bo Monemar2, William J Schaff4, Ching-Lien Hsiao5, Li-Chyong Chen5, Li-Wei Tu6, Tomohiro Yamaguchi7, Yasushi Nanishi7. 1Instituto Tecnológico e Nuclear, Sacavèm, Portugal, 2Linköping University, Linköping, Sweden, 3University of Nebraska, Lincoln, NE, United States, 4Cornell University, Ithaca, NY, United States, 5National Taiwan University, Taipei, Taiwan, 6National Sun Yat-Sen University, Kaohsiung, Taiwan, 7 Ritsumeikan University, Shiga, Japan
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3:15
| Characterization of pentacosa-10,12-diynoic acid by spectroscopic imaging ellipsometry
Shih-Hsin Hsu1, Yia-Chung Chang1, Chau-Hwang Lee1, Pei-Kuen Wei1, Chiao-Wei Tseng2, Yu-Tai Tao2. 1Research Center for Applied Sciences, Academia Sinica, Taipei, Taiwan, 2Institute of Chemistry, Academia Sinica, Taipei, Taiwan
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3:30
| Optical simulations of infrared spectra: retrieving information on structure, orientation and conductivity of thin films
K. Roodenko, O. Seitz, S. K. Park, Y. J. Chabal. Laboratory for Surface and Nanostructure Modification, Dept. Material Science and Engineering, University of Texas Dallas, Richardson, TX, United States
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4:15 - 6:00 PM
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Imaging and High Speed
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Chair: Ilsin An
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4:15
| Expanded beam ellipsometry
Miklos Fried1, György Juhász1, Csaba Major1, Péter Petrik1, Olivér Polgár1, Zoltán Horváth2. 1Res. Inst. for Technical Physics & Materials Science (MFA), Budapest, Hungary, 2Res. Inst. for Solid State Physics and Optics (SZFKI), Budapest, Hungary
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4:45
| Development of Biosensor based on Imaging Ellipsometry and biomedical applications
Gang Jin. NML, Institute of Mechanics, Chinese Academy of Sciences, Beijing, China
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5:15
| Identification and Authentication Testing of Native Surface Features and Artificial Layer Modifications by means of Imaging Ellipsometry
Dirk Hönig1, Stefan Schneider1, Ralph Domnick2, Mathias Belzner2, Uwe Beck3, Andreas Hertwig3, Ralph Stephanowitz3. 1Accurion GmbH, Göttingen, Germany, 2ARA-Coatings GmbH, Erlangen, Germany, 3BAM (Federal Institute for Materials Research and Testing), Berlin, Germany
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5:30
| Fast near infra-red Ferroelctric Liquid Crystal based Mueller matrix system for imaging and spectroscopy
Morten Kildemo, Lars Martin Sandvik Aas, Pål Gunnar Ellingsen, Mikael Lindgren, Trondheim, Norway
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5:45
| Improvement for sensitivity of biosensor with total internal reflection imaging ellipsometry (TIRIE)
Li Liu1,2, Yanyan Chen3, Yonghong Meng1, She Chen1, Gang Jin1. 1National Microgravity laboratory, Institute of Mechanics, Chinese Academy of Sciences, Beijing, China, 2Graduate University of Chinese Academy of Sciences, Beijing, China, 3Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences, Suzhou, China
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7:00 - 9:00 PM
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Poster Session 2
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8:30 - 10:00 AM
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Mueller Matrix Ellipsometry Instrumentation
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Chair: Hans Arwin
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8:30
| THz ellipsometry
T. Hofmann1, C.M. Herzinger2, M. Schubert1. 1Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE, United States, 2J.A. Woollam Co., Lincoln, NE, United States
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9:00
| Far-infrared Mueller Matrix Ellipsometer at the National Synchrotron Light Source
Tae Dong Kang1, Paul Rogers1, Eric Standard1, Gelu Nita1, Tao Zhou1, Larry Carr2, Stefan Zollner3, Michael Kotelyanskii1,4, Andrei Sirenko1. 1Department of Physics, New Jersey Institute of Technology, Newark, NJ, United States, 2Brookhaven National Laboratory, Upton, NY, United States, 3IBM Systems and Technology Group, Hopewell Junction, NY, United States, 4Rudolph Technologies, Inc., Flanders, NJ, United States
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9:30
| Vacuum UV multichannel ellipsometry: Instrumentation and applications
Ilsin An. , Ansan, Korea
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10:30 - 12:15 PM
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Complementary Techniques and Correlations II
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Chair: Dave Aspnes
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10:30
| Real time Optical Probes of ALD and CVD Thin Films for c-Si Photovoltaics
Erwin Kessels, Nick M. Terlinden, Joost Gielis, Erik Langereis, Richard Van de Sanden. Eindhoven University of Technology, Eindhoven, Netherlands
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11:00
| Refinement of dispersion theories for ZnO:Al thin films
Nicole Ehrmann, Rolf Reineke-Koch. Institute for Solar Energy Research GmbH Hameln (ISFH), D-31860 Emmerthal, Germany
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11:15
| Development of Combinatorial, in-situ, Spectroscopic Ellipsometry and Quartz Crystal Microbalance
Keith B. Rodenhausen1, Tino Hofmann2, Mathias Schubert2, Tom E. Tiwald3, Mark Solinsky4, Matthew Wagner4. 1Department of Chemical and Biomolecular Engineering, University of Nebraska-Lincoln, Lincoln, NE, United States, 2Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, NE, United States, 3J. A. Woollam Co., Lincoln, NE, United States, 4The Procter & Gamble Company, Cincinnati, OH, United States
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11:30
| Properties of Ga-Doped ZnO Thin Films by Phase-Modulated Spectroscopic Ellipsometry
Donald L. Agresta1, Kevin Leedy1, Tuoc Dang1, David Tomich1, Robin Scott2. 1Air Force Research Laboratory, Wright=Patterson AFB, OH, United States, 2Arizona State University, Tempe, AZ, United States
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11:45
| Determination of the refractive index of single crystal bulk samples and micro-structures
Philipp Kühne1,2, Christian Czekalla1, Rüdiger Schmidt-Grund1, Chris Sturm1, Marius Grundmann1. 1Universität Leipzig, Institut für Experimentelle Physik II, Linnestr. 5, Leipzig, Germany, 2University of Nebraska-Lincoln, Department of Electrical Engineering, 209N WSEC, Lincoln, NE, United States
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12:00
| Systematic combination of X-ray reflectometry and spectroscopic ellipsometry: a powerful technique for reliable in-fab metrology
Emmanuel S Nolot, Agathe André. CEA,LETI,MINATEC, Grenoble, France
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1:45 - 3:30 PM
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Wrap-Up Session
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